21 results
Fabrication of p+/n Ultra Shallow Junctions (USJ) in silicon by excimer laser doping from spin-on glass sources
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- Journal:
- MRS Online Proceedings Library Archive / Volume 810 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, C4.13
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- 2004
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Long-Pulse Duration Excimer Laser Processing in the Fabrication of High Performance Polysilicon TFTs for Large Area Electronics
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- MRS Online Proceedings Library Archive / Volume 685 / 2001
- Published online by Cambridge University Press:
- 17 March 2011, D7.1.1
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- 2001
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Vacuum Ultraviolet and Visible Optical Emission Spectra from Laser Ablation of Graphite at 193 NM: Application to Carbon Nitride Thin Films Deposition
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- MRS Online Proceedings Library Archive / Volume 526 / 1998
- Published online by Cambridge University Press:
- 15 February 2011, 337
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- 1998
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Crystallization of Si(1-yCy Films by Excimer Laser Annealing: Characterization of the Microstructure of the Films
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- MRS Online Proceedings Library Archive / Volume 452 / 1996
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- 15 February 2011, 959
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- 1996
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Si. I-x-y. GexCy Film Formation by Pulsed Excimer Laser Crystallization of Heavily Ge and C Implanted Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 354 / 1994
- Published online by Cambridge University Press:
- 21 February 2011, 585
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- 1994
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ArF Excimer Laser Doping into Amorphous Silicon thin films
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- MRS Online Proceedings Library Archive / Volume 219 / 1991
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- 21 February 2011, 739
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- 1991
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Phosphorus and Boron Doping of Silicon Thin Films Using ArF Excimer Laser
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- MRS Online Proceedings Library Archive / Volume 236 / 1991
- Published online by Cambridge University Press:
- 25 February 2011, 389
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- 1991
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Thin films of BiSrCaCu oxide prepared by laser evaporation
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- Journal:
- Journal of Materials Research / Volume 5 / Issue 2 / February 1990
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- 31 January 2011, pp. 258-264
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- February 1990
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Laser Assisted Deposition of Thin BiSrCaCuO Films
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- MRS Online Proceedings Library Archive / Volume 191 / 1990
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- 16 February 2011, 229
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- 1990
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Laser-induced forward transfer: A new approach for the deposition of high Tc superconducting thin films
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- Journal of Materials Research / Volume 4 / Issue 5 / October 1989
- Published online by Cambridge University Press:
- 31 January 2011, pp. 1082-1086
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- October 1989
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Boron Doping of Silicon Using Excimer Lasers
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- MRS Online Proceedings Library Archive / Volume 129 / 1988
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- 25 February 2011, 591
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- 1988
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A Comparison of the Gas Phase Processes Resulting from SiH4 and Si2H6 Photodissociation with a Pulsed ArF Excimer Laser
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- MRS Online Proceedings Library Archive / Volume 129 / 1988
- Published online by Cambridge University Press:
- 25 February 2011, 195
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- 1988
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Seminar on Excimer Lasers for Fundamental and Applied Physics Held in France
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- MRS Bulletin / Volume 12 / Issue 2 / March 1987
- Published online by Cambridge University Press:
- 29 November 2013, p. 93
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- March 1987
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Study of SiO2 Formation by Plasma Treatment of SiO Thin Films
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- MRS Online Proceedings Library Archive / Volume 105 / 1987
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- 22 February 2011, 85
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- 1987
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Two-Photon Absorption Cross Section for Silane Under Pulsed Arf (193 nm) Excimer Laser Irradiation
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- MRS Online Proceedings Library Archive / Volume 101 / 1987
- Published online by Cambridge University Press:
- 26 February 2011, 361
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- 1987
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Comparison of the Processes Induced by Mercury Lamp and ArF Excimer Laser Photoassisted CVD of a-Si:H Films
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- MRS Online Proceedings Library Archive / Volume 75 / 1986
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- 28 February 2011, 195
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- 1986
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Laser Induced Oxidation of Heavily Doped Silicon*
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- MRS Online Proceedings Library Archive / Volume 51 / 1985
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- 26 February 2011, 173
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- 1985
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High Resolution Z-Contrast Imaging and Lattice Location Analysis of Dopants in Ion-Implanted Silicon*
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- MRS Online Proceedings Library Archive / Volume 41 / 1984
- Published online by Cambridge University Press:
- 25 February 2011, 287
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- 1984
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Optical Properties of Laser Induced Heavily Doped Silicon Layers
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- MRS Online Proceedings Library Archive / Volume 23 / 1983
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- 22 February 2011, 159
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- 1983
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Impurity Distribution Profiles and Surface Disorder after Laser Induced Diffusion.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 13 / 1982
- Published online by Cambridge University Press:
- 15 February 2011, 311
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- 1982
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